Description

Lam Research Corporation specializes in the development, production, global distribution, refurbishment, and ongoing maintenance of sophisticated equipment vital for manufacturing integrated circuits. The company's product portfolio is extensive, addressing various stages of semiconductor processing. For deposition, it offers ALTUS systems, which facilitate the deposition of conformal films crucial for tungsten metallization; SABRE electrochemical deposition solutions for copper interconnect transitions, enabling copper damascene fabrication; SOLA ultraviolet thermal processing tools for advanced film treatments; and VECTOR plasma-enhanced CVD ALD products. Further deposition technologies include SPEED high-density plasma chemical vapor deposition for gapfill applications, and Striker single-wafer atomic layer deposition systems for dielectric film solutions. In the realm of etching, Lam Research provides Flex for dielectric etch processes; Kiyo for conductor etch applications; Syndion for through-silicon via etch applications; and Versys metal products tailored for metal etch processes. Beyond these core technologies, the company also supplies Coronus bevel clean products, designed to boost die yield; a comprehensive suite of wafer cleaning systems including the Da Vinci, DV-Prime, EOS, and SP series; and Metryx mass metrology systems, which ensure highly precise in-line mass measurement during semiconductor wafer manufacturing. Serving the global semiconductor industry, Lam Research distributes its offerings across the United States, China, Europe, Japan, Korea, Southeast Asia, Taiwan, and other international markets. The company, which was established in 1980, maintains its corporate headquarters in Fremont, California.