Description

Tokai Carbon Korea Co., Ltd. produces and sells various parts and components for the semiconductor, light emitting diode (LED), and solar industries in South Korea. The company offers high purified graphite components for use in heaters, crucibles, Gr shields, rings, reflectors, wafer holders, etc.; and plates and other products for semiconductor manufacturing equipment. It also provides wafer susceptors for LED MOCVD and silicon Epi reactors, including LED wafer carriers, and ALD semiconductor and Epi susceptors; and CVD SiC coated components that are used in SiC rings, wafers, and shower heads for lifetime extension and yield improvement of plasma etch chamber parts. Tokai Carbon Korea Co., Ltd. was incorporated in 1996 and is based in Anseong-si, South Korea.