Description

Established in 1996 and headquartered in Anseong-si, South Korea, Tokai Carbon Korea Co., Ltd. specializes in the production and sale of various components for the semiconductor, light-emitting diode (LED), and solar energy sectors. The company offers a diverse range of high-purity graphite parts, including heaters, crucibles, graphite shields, rings, reflectors, and wafer holders, as well as plates and other items for semiconductor manufacturing equipment. Furthermore, it supplies wafer susceptors for LED MOCVD and silicon epitaxial reactors, encompassing LED wafer carriers and ALD semiconductor and Epi susceptors. Tokai Carbon Korea also provides CVD silicon carbide (SiC) coated components, which are vital for SiC rings, wafers, and shower heads, enhancing the lifespan and improving the yield of plasma etch chamber parts.